The Tate Lab maintains an RF sputter system in Gilbert 130. It is a large system (> 100 liter?), currently turbo pumped. It has two 2“ guns, 1 1” gun, 2 rf power supplies. Base pressure is about 10^-6 torr. 2011 - Chris Reidy knows most about this system. (Formerly, 2009 - Annette Richard; 2005-ish Jack Rundel, 2001-ish Andrew Draeseke)