Tate Lab Wiki

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Ellipsometry

Spectroscopic ellipsometer at ATAMI

Model:M-2000X (Variable Angle Spectroscopic Ellipsometer

Wavelengths: continuous from 240 nm to 1000 nm

CompleteEase analysis software (Woollam)

Ellipsometry tutorial from Woollam

FS 6-wavelength ellipsometer in Owen Clean Room

Model: Film Sense Multiwavelength model xx Film Sense website

Wavelengths: 6 wavelengths, 410.31, 450.39, 525.64, 655.55, 850.36, 954.31 nm

FS proprietary analysis software. Manual


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