Tate Lab Wiki

You are here: start » sputter

Differences

This shows you the differences between two versions of the page.

Link to this comparison view

Both sides previous revisionPrevious revision
Next revision		Previous revision
sputter:start [2011/09/27 10:25] – janetsputter:start [2020/03/06 09:04] (current) – external edit 127.0.0.1
Line 1: Line 1:
 ====== Gilbert Hall Sputter System ====== ====== Gilbert Hall Sputter System ======
 +As of 2013, this system has been DECOMMSSIONED.
 +
 The Tate Lab maintains an RF sputter system in Gilbert 130.  It is a large system (> 100 liter?), currently turbo pumped.  It has two 2" guns, 1 1" gun, 2 rf power supplies.  Base pressure is about 10^-6 torr.   The Tate Lab maintains an RF sputter system in Gilbert 130.  It is a large system (> 100 liter?), currently turbo pumped.  It has two 2" guns, 1 1" gun, 2 rf power supplies.  Base pressure is about 10^-6 torr.  
 2011 - Chris Reidy knows most about this system. 2011 - Chris Reidy knows most about this system.

Trace:

QR Code
QR Code sputter:start (generated for current page)