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sputter:start [2011/09/27 10:24] janetsputter:start [2020/03/06 09:04] (current) – external edit 127.0.0.1
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 ====== Gilbert Hall Sputter System ====== ====== Gilbert Hall Sputter System ======
 +As of 2013, this system has been DECOMMSSIONED.
 +
 The Tate Lab maintains an RF sputter system in Gilbert 130.  It is a large system (> 100 liter?), currently turbo pumped.  It has two 2" guns, 1 1" gun, 2 rf power supplies.  Base pressure is about 10^-6 torr.   The Tate Lab maintains an RF sputter system in Gilbert 130.  It is a large system (> 100 liter?), currently turbo pumped.  It has two 2" guns, 1 1" gun, 2 rf power supplies.  Base pressure is about 10^-6 torr.  
 2011 - Chris Reidy knows most about this system. 2011 - Chris Reidy knows most about this system.
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 ====== Documentation ====== ====== Documentation ======
- A linked Word document updated 2005 is here:{{:sputter:sputtering_system_101205_jt.doc|Gilbert 130 Sputter System}}.  Some of this is outdated (2011) because the system has been moved since then.+ A linked Word document updated 2005 is here:{{:sputter:sputtering_system_101205_jt.doc|Gilbert 130 Sputter System}}.  Some of this is outdated (2011) because the system has been moved to Gil 130 from Gil 212 since then.
  

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