Differences

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--- sputter:start [2011/07/26 13:53] – janet
+++ sputter:start [2020/03/06 09:04] (current) – external edit 127.0.0.1
@@ Line 1: / Line 1: @@
 ====== Gilbert Hall Sputter System ======
+As of 2013, this system has been DECOMMSSIONED.
 The Tate Lab maintains an RF sputter system in Gilbert 130.  It is a large system (> 100 liter?), currently turbo pumped.  It has two 2" guns, 1 1" gun, 2 rf power supplies.  Base pressure is about 10^-6 torr.
 - Chris Reidy knows most about this system.
 (Formerly: 2009 Annette Richard & Joe Magner; 2005 Jack Rundel; 2004 Dave Mack; 2003 James Osborne; 2002 Matt Price)
+/2011: Robert Kykyneshi reminded me that Chris Tasker (ECE) had borrowed one of the RF powers supplies and corresponding matching network.  There is currently only one set in Gilbert 130.
 ====== Documentation ======
- A linked Word document updated 2005 is here:{{:sputter:sputtering_system_101205_jt.doc|Gilbert 130 Supper System}} Some of this is outdated (2011)because the system has been moved since then.
+ A linked Word document updated 2005 is here:{{:sputter:sputtering_system_101205_jt.doc|Gilbert 130 Sputter System}}.  Some of this is outdated (2011) because the system has been moved to Gil 130 from Gil 212 since then.

Trace: • xrd