Differences
This shows you the differences between two versions of the page.
Next revision | Previous revision | ||
sputter:start [2011/07/26 13:41] – created janet | sputter:start [2020/03/06 09:04] (current) – external edit 127.0.0.1 | ||
---|---|---|---|
Line 1: | Line 1: | ||
====== Gilbert Hall Sputter System ====== | ====== Gilbert Hall Sputter System ====== | ||
+ | As of 2013, this system has been DECOMMSSIONED. | ||
+ | |||
The Tate Lab maintains an RF sputter system in Gilbert 130. It is a large system (> 100 liter?), currently turbo pumped. | The Tate Lab maintains an RF sputter system in Gilbert 130. It is a large system (> 100 liter?), currently turbo pumped. | ||
2011 - Chris Reidy knows most about this system. | 2011 - Chris Reidy knows most about this system. | ||
- | (Formerly, 2009 - Annette Richard; 2005-ish Jack Rundel, 2001-ish Andrew Draeseke) | + | (Formerly: 2009 Annette Richard |
+ | |||
+ | 9/2011: Robert Kykyneshi reminded me that Chris Tasker (ECE) had borrowed one of the RF powers supplies and corresponding matching network. | ||
====== Documentation ====== | ====== Documentation ====== | ||
- | + | A linked Word document updated 2005 is here: | |