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Veeco Thermal Evaporator Wngr 489

Glass bell jar pumped by a diffusion pump which is backed by a mechanical pump. Commissioned about 1965? O-ring sealed. Base pressure about 1 x 10^-6 torr. Ion gauge and convectron gauges. Large electrical feedthroughs. Quartz crystal monitors.

Current Status (09 August 2011)

The evaporator is currently down.

Crystal Monitor #3 is the only monitor that is working. The other two are having problems with their CRT displays. If you want to use the monitor for depositions with multiple layers using the feedback control, it is possible to connect the monitor to another boat during the deposition process.

Tips for using the evaporator

Make sure to fill out the user log! Put your name, date/time of use, material(s) you are evaporating, base pressure, and anything out of the ordinary that you notice.

Always wear gloves when working inside the evaporator. Lots of materials that you probably don't want on your body get evaporated in there. We also do not want oils inside the bell jar.

The shutter is controlled by magnet that is turned on and off using the switch. It is important to keep the switch in the off position when not opening or closing the shutter to prevent the magnetic coils from burning out. Having the magnets on when evaporating metals also isn't a good idea.

The shutter itself is finicky. The power supply was recently updated, improving its performance, but the design often causes the shutter to get caught on the metal frame inside the bell jar. It is important to make sure that the shutter is working after the bell jar is closed (you can hear it). Checking that the shutter is operating correctly after the bell jar has been evacuated is more difficult, but can be accomplished with the use of a flashlight.

Always use the metal shield during depositions to keep materials off of the side of the bell jar. If the bell jar gets too dirty, the green 3M Scotch-Brite scrubbing pads work great to clean it. Lots of crud will fall from the jar - catching it in a garbage bag will make cleanup much easier. Wear gloves and a mask.

Maintenance Log

8/09/2011 - Roughing pump oil changed. Old oil was brown and had significant amounts of debris floating in it. Added a permanent maintenance log to the blue binder holding all of the user manuals for the system. - RW

6/17/2011 - Inside of bell jar and all surfaces cleaned. Shutter operation fixed. Ion gauge degaussed; now reads more realistic pressure. - RW

Schrader Thermal Evaporator Wngr 489

Stainless steel box evaporator commissioned 1991. Conflat-sealed except for o-ring-sealed front door. Base pressure few x 10^-8 torr. Cryopumped. Roughing pump is rotary vane 27 cfm pump.

Current Status (April 2011)

Inactive. Cryopump needs fixing. Compressor is fine.

Maintenance Log


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