Maintenance Schedule

Object	Location	Action	Period/Condition	Notes
Alcatel mechanical pump	Thermionics Load Lock	Change oil, clean filter, replace sorbent as needed	6 month	Hydrocarbon oil
BOC Edwards Mechanical Pump	Thermionics Main Chamber	Change oil, clean filter, replace sorbent as needed	6 months	Krytox only. No Hydrocarbons
Alcatel Turbo Pump	Thermionics Load Lock	Lubricate bearings	5000 hours	Syringes are cheapest from Ideal Vacuum
BOC Edwards Turbo Pump	Thermionics Main Chamber	Check temperature	Weekly
Chiller	Thermionics Main Chamber	Check water level	6 month
Beam Entrance Port	Thermionics Main Chamber	Clean with Vienna chalk, record transmission	when coated, or when chamber is vented
KrF gas	Excimer Laser	Follow instructions	Low beam energy, missing pulses
Halogen Filter	Excimer Laser Mechanical Pump	Replace filter	Filling >90%
Clean laser optics	Excimer laser	See manual	Output energy < 250mJ @ 7Hz, after fresh gas change