This is an old revision of the document!
| Date | Name | Description |
|---|---|---|
| 2012.06.25 | JF/CR | Moved mass flow controller from TMP purge port to process gas line. This gives much better control over the pressure. Move it back if you need to purge the pump for some reason (e.g. after growing in a corrosive gas). |
| 2012.05 | CR/JF | Baratrons switched from individual controllers to Labview/computer control. Existing controllers (MKS PDR 2000 and card for Lesker Multigauge) stopped functioning. |
