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Table of Contents
Ellipsometry
Spectroscopic ellipsometer at ATAMI
Model:M-2000X (Variable Angle Spectroscopic Ellipsometer
Wavelengths: continuous from 240 nm to 1000 nm
CompleteEase analysis software (Woollam)
Automated mapping 150 mm x 150 mm
Ellipsometry tutorial from Woollam
FS 6-wavelength ellipsometer in Owen Clean Room
Model: Film Sense Multiwavelength model xx Film Sense website
Wavelengths: 6 wavelengths, 410.31, 450.39, 525.64, 655.55, 850.36, 954.31 nm
FS proprietary analysis software. Manual
Automated Mapping size?
SCOUT Modelling Software
In McIntyre Lab. We use mostly for reflection and transmission but also models ellipsometric data.
