This is an old revision of the document!
Table of Contents
Ellipsometry
Spectroscopic ellipsometer at ATAMI
Model:M-2000X (Variable Angle Spectroscopic Ellipsometer
Wavelengths: continuous from 240 nm to 1000 nm
CompleteEase analysis software (Woollam)
Ellipsometry tutorial from Woollam
FS 6-wavelength ellipsometer in Owen Clean Room
Model: Film Sense Multiwavelength model xx Film Sense website
Wavelengths: 6 wavelengths, 410.31, 450.39, 525.64, 655.55, 850.36, 954.31 nm
FS proprietary analysis software. Manual
