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Spectroscopic ellipsometer at ATAMI
Model: Wavelengths: continuous from xx nm to yy nm CompleteEase analysis software
FS 6-wavelength ellipsometer in Owen Clean Room
Model: Film Sense Multiwavelength model xx https://film-sense.com/ Wavelengths: 6 wavelengths, 410.31, 450.39, 525.64, 655.55, 850.36, 954.31 nm FS proprietary analysis software. Manual
