Tate Lab Wiki

Differences

This shows you the differences between two versions of the page.

Link to this comparison view

Both sides previous revisionPrevious revision
Next revision
Previous revision
thermal:start [2011/08/09 18:07] riverthermal:start [2020/03/06 09:04] (current) – external edit 127.0.0.1
Line 1: Line 1:
 ====== Veeco Thermal Evaporator Wngr 489 ====== ====== Veeco Thermal Evaporator Wngr 489 ======
-Glass bell jar pumped by a diffusion pump which is backed by a mechanical pump.  Commissioned about 1965?  O-ring sealed. Base pressure about 1 x 10^-6 torr.  Ion gauge and convectron gauges.  Large electrical feedthroughs. Quartz crystal monitors.+Glass bell jar pumped by a diffusion pump backed by a mechanical pump.  Commissioned about 1965?  O-ring sealed. Base pressure about 1 x 10^-6 torr.  Ion gauge and convectron gauges.  Large electrical feedthroughs. Quartz crystal monitors.
  
-===== Current Status (09 August 2011)=====+===== Status =====
  
-The evaporator is currently down+== 12 August 2014 == 
 +**Inactive** - Leak detected between bell jar and base plate.  Awaiting parts for the diffusion pump cooling lines flow switch.  Researching replacements for malfunctioning crystal monitor controllers.
  
-Crystal Monitor #3 is the only monitor that is working. The other two are having problems with their CRT displays. If you want to use the monitor for depositions with multiple layers using the feedback control, it is possible to connect the monitor to another boat during the deposition process. 
  
 +== 05 July 2012 ==
 +Two of the three crystal monitors are currently operational.
 +Shutter is not operational.  
  
  
Line 24: Line 27:
 ===== Maintenance Log===== ===== Maintenance Log=====
  
-8/09/2011 - Roughing pump oil changed. Old oil was brown and had significant amounts of debris floating in it. Added a permanent maintenance log to the blue binder holding all of the user manuals for the system. RW +== 09/02/2015 JH ==
  
-6/17/2011 - Inside of bell jar and all surfaces cleaned. Shutter operation fixed. Ion gauge degaussed; now reads more realistic pressure. - RW+- Chiller water turned black due to the break down of glycol in the cooling water (causing the cooling water to become corrosive).  Chiller is being flushed, sanitized, and refilled by [[http://www.chemaqua.com/index2.asp|Chem-Aqua]]. 
 + 
 +- Update to the waterlines for cooling the evaporation terminals and crystal monitors is complete. 
 + 
 +- Water leak found for line going into diffusion pump, possibly caused by the corrosive water in water the lines. 
 + 
 +== 06/19/2014 - JH == 
 +- Diffusion pump cleaned, and oil changed. 
 + 
 +== 06/19/2013 - RW == 
 + 
 +- Roughing pump oil changed. Old oil in good condition. 
 + 
 +== 07/13/2012 - RW == 
 + 
 +- Diffusion pump oil changed. Refilled with 200 cc Dow 704. Old oil had yellowish color. No visible debris. Some tarring on the DP walls. Fixed minor leaks in deposition rate detector water lines. Chamber now holds at 0.1 Torr for 3+ days. 
 + 
 +== 07/03/2012 - RW == 
 +  
 +- Roughing pump oil changed. Good color. Some debris. 
 + 
 +== 8/09/2011 - RW == 
 + 
 +- Roughing pump oil changed. Old oil was brown and had significant amounts of debris floating in it. Added a permanent maintenance log to the blue binder holding all of the user manuals for the system. 
 + 
 +== 6/17/2011 - RW == 
 + 
 +- Inside of bell jar and all surfaces cleaned. Shutter operation fixed. Ion gauge degaussed; now reads more realistic pressure.
  
 ====== Schrader Thermal Evaporator Wngr 489 ====== ====== Schrader Thermal Evaporator Wngr 489 ======
-Stainless steel box evaporator commissioned 1991.  Conflat-sealed except for o-ring-sealed front door.  Base pressure few x 10^-8 torr. Cryopumped.  Roughing pump is rotary vane 27 cfm pump.+Stainless steel box evaporator commissioned 1991.  Conflat-sealed except for o-ring-sealed front door.  Base pressure few x 10^-8 torr. Turbo pumped.  Roughing pump is rotary vane 27 cfm pump (?). 3 thermal sources monitored by quartz crystals. Reactive environment possible.
  
 +===== Status =====
 +== June 2013 == 
 +Upgraded over 2012/13 academic year by Casey Hines. Casey's thesis has a description. {{:theses:hines_bs_2013.pdf|Practical Implementation of a Physical Vapor Deposition System in a Research Environment}}
  
-===== Current Status (April 2011)=====+== June 2011 ==
 Inactive.  Cryopump needs fixing.  Compressor is fine. Inactive.  Cryopump needs fixing.  Compressor is fine.
  
 ===== Maintenance Log===== ===== Maintenance Log=====

QR Code
QR Code thermal:start (generated for current page)