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| pld:start [2016/09/27 11:57] – bethany | pld:start [2020/03/06 09:04] (current) – external edit 127.0.0.1 |
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| {{:pld:thermionics_chamber_20150422.png|}} | {{:pld:thermionics_chamber_20150422.png|}} |
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| | {{PLD_process_schematic-ours.png|}} |
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| ==== Load Lock ==== | ==== Load Lock ==== |
| heating | heating |
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| {{:pld:compex_0300_user_manual_.pdf|ComPex 201 excimer laser manual}} | ComPex 201 excimer laser manual has been taken off-line |
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| {{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 201 | {{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 201 |
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| The process we use for cleaning targets/substrate holders includes a series of increasing grit sand paper. The grit sizes range from 200 to 2000 and depending on the density of the material we may start at a smaller or larger grit. For example a soft ceramic target will most likely require you to start with a higher grit (say 800 or 1000) while polishing the substrate holders may require a much lower grit (say 200 or 400) to remove as much of the deposited material as possible. One thing to keep in mind when polishing targets/substrate holders is that the type of material you are polishing may be toxic. A list of toxic metals which need to be disposed of through EH&S is posted on the fume hood and can also be found {{:pld:hazardous_heavy_metals.docx|here}}. | The process we use for cleaning targets/substrate holders includes a series of increasing grit sand paper. The grit sizes range from 200 to 2000 and depending on the density of the material we may start at a smaller or larger grit. For example a soft ceramic target will most likely require you to start with a higher grit (say 800 or 1000) while polishing the substrate holders may require a much lower grit (say 200 or 400) to remove as much of the deposited material as possible. One thing to keep in mind when polishing targets/substrate holders is that the type of material you are polishing may be toxic. A list of toxic metals which need to be disposed of through EH&S is posted on the fume hood and can also be found {{:pld:hazardous_heavy_metals.docx|here}}. |
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| | ==Cleaning Chamber == |
| | Advice from Hiroshi Yanagi (Yamanashi) about cleaning a sulfide chamber (2017). "We use H2O2 for cleaning vacuum chamber, but only when it is terrible. Usually, acetone and alcohol is enough. When you use H2O2 or cleanser, clean up with water, acetone and alcohol. Then bake the chamber. For window cleaning, we used abrasive cleanser for bright polishing of metal surface (not for dish cleaning.)" |
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