Differences

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--- pld:start [2015/02/11 12:47] – james
+++ pld:start [2020/03/06 09:04] (current) – external edit 127.0.0.1
@@ Line 1: / Line 1: @@
 ====== Pulsed Laser Deposition ======
-The PLD system comprises a ComPex 205 248-nm excimer laser plus optical elements and two vacuum chambers.  It is located in Weniger 475.  [[safety:start|Safety]] procedures must be observed at all times.
+The PLD system comprises a ComPex 201 248-nm excimer laser plus optical elements and two vacuum chambers.  It is located in Weniger 475.  [[safety:start|Safety]] procedures must be observed at all times.
 A log of important modifications to the system can be found [[pld:changelog|here]].  If you want to know why something is the way it is, start here.
@@ Line 8: / Line 8: @@
 The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock.  The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections.  The load lock and the main chamber are each served by two vacuum pumps, a turbo-molecular pump and a roughing pump working in series.
-{{:pld:pld_thermionics_system.gif|}}  FIXME - make this smaller
+{{:pld:thermionics_chamber_20150422.png|}}
+{{PLD_process_schematic-ours.png|}}
 ==== Load Lock ====
@@ Line 46: / Line 48: @@
 //Thermionics chamber//: The Thermionics chamber is set up so that in event of a power failure, the valves between the roughing and turbo pumps will remain closed and the pumps will not turn back on when power is restored. However, the gate valve to the main chamber will be automatically closed, which will prevent the chamber from venting to atmospheric pressure immediately. With the gate valve closed, the pressure should stay in the 10<sup>-7</sup> Torr range and very slowly increase until the system is reset.
-If you discover that the power has gone out, make sure that the gate valve has closed (by the red indicator light if the power has been restored, or the white spot on the indicator beneath the gate valve motor is on closed). If the valve is closed, you can use {{:pld:pldthermionicsresetinstructions012915.pdf|these instructions}} to restore the system.  If the pressure is higher than 10<sup>-3</sup> or if the gate valve does not appear to have closed, then follow the Pump Down Procedures in the instructions (toggle switch up on silver panel, reset buttons on black panels, wait for the pressure to drop below 10<sup>-3</sup> Torr range, then restart Turbo Pumps). Here is a schematic for reference.{{:pld:control_tower.gif|}}
+If you discover that the power has gone out, make sure that the gate valve has closed (by the red indicator light if the power has been restored, or the white spot on the indicator beneath the gate valve motor is on closed). If the valve is closed, you can use {{:pld:reset_pld_thermionics_2016.pdf|these instructions}} to restore the system.  If the pressure is higher than 10<sup>-3</sup> or if the gate valve does not appear to have closed, then follow the Pump Down Procedures in the instructions (toggle switch up on silver panel, reset buttons on black panels, wait for the pressure to drop below 10<sup>-3</sup> Torr range, then restart Turbo Pumps). Here is a schematic for reference.{{:pld:control_tower.gif|}}
@@ Line 72: / Line 74: @@
 There are many windows on the thermionics chamber.  However, there are two UV grade laser windows.  Each of these is mounted in a ConFlat flange.  Each of the laser windows is made of [[http://marketplace.idexop.com/store/SupportDocuments/MaterialProperties.pdf|fused silica]], and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm.
-===== Procedure =====
+===== Standard Operating Procedure =====
-{{:pld:pld_procedure.tex.pdf|Thermionics Chamber}} - Josh Russell
+{{:pld:pld_procedure.tex.pdf|Thermionics Chamber}}
-{{:pld:neocera.pld.instructions.pdf|Neocera Chamber}}
+{{:pld:neocera_chamber_sop.pdf|Neocera Chamber}}
-{{:pld:gas_change_20120606.pdf|Laser Gas Change}}
+{{:pld:laser_sop-tate_lab.doc|Laser Operation}}
-__**Viewing window cleaning procedures**__
+{{:pld:gas_change_20150416.pdf|Laser Gas Change}}
-Use the paste from lambda physik called Vienna chalk, it is actually a white powder. You need to make a slurry, and a few drops of water go a long way.
+{{:pld:PLD_viewing_window_cleaning_20150422.pdf|Chamber Window Cleaning}}
-When you think that the slurry is too thick, it is just right.  If it is too watery, the abrasive in the slurry will be ineffective at cleaning.
-Change lens tissues often. As the voids in the paper clog, the cleaning efficiency goes way down.
-After you have cleaned a window, there will be water droplets in small voids that are difficult to dry. This will kill the chamber pressure for quite a long time. You can reduce this by rinsing the window with isopropanol, and then blow drying with N2 gas.  Do this 3-4 times, and be thorough.  Ideally, you would bake the window at 120 C for an hour after this treatment, but most windows will not fit in the furnace we have available.
-FIXME
-Chamber cleaning procedures
 ===== Routine Maintenance =====
@@ Line 99: / Line 94: @@
 heating
-{{:pld:compex_0300_user_manual_.pdf|ComPex 205 excimer laser manual}}
+ComPex 201 excimer laser manual has been taken off-line
+{{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 201
-{{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205
-Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}}
 {{:pld:dbc2-12_chamber_darwing.pdf|Neocera 12" chamber drawing}}
+==Changing Gas==
+Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}}
+The premixed gas we use is: 0.1% F2, 1.7% He, 3.93% Kr, balance Ne (i.e. rest is Neon), and the SDS is {{:pld:krf_premix_spectra.pdf|KrF premix SDS}}
+Usually purchased from Airgas, contact can be found by following the [[:Purchasing|Purchasing]] link
+==Cleaning/polishing Targets and Substrate Holders==
+The process we use for cleaning targets/substrate holders includes a series of increasing grit sand paper.  The grit sizes range from 200 to 2000 and depending on the density of the material we may start at a smaller or larger grit.  For example a soft ceramic target will most likely require you to start with a higher grit (say 800 or 1000) while polishing the substrate holders may require a much lower grit (say 200 or 400) to remove as much of the deposited material as possible.  One thing to keep in mind when polishing targets/substrate holders is that the type of material you are polishing may be toxic.  A list of toxic metals which need to be disposed of through EH&S is posted on the fume hood and can also be found {{:pld:hazardous_heavy_metals.docx|here}}.
+==Cleaning Chamber ==
+Advice from Hiroshi Yanagi (Yamanashi) about cleaning a sulfide chamber (2017). "We use H2O2 for cleaning vacuum chamber, but only when it is terrible. Usually, acetone and alcohol is enough. When you use H2O2 or cleanser, clean up with water, acetone and alcohol. Then bake the chamber. For window cleaning, we used abrasive cleanser for bright polishing of metal surface (not for dish cleaning.)"
+===== Service =====
+[[https://www.linkedin.com/pub/frank-cipolla/6/a2a/340|Frank Cipolla]], ONI Corp, (954) 296-0350, formerly of Lambda Physik, has worked on our laser.  Very good service.
+email is the best way to contact Frank, frank-cipolla@oni-corp.com

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