Differences
This shows you the differences between two versions of the page.
| Both sides previous revisionPrevious revisionNext revision | Previous revision | ||
| mask:start [2011/04/14 00:43] – river | mask:start [2020/03/06 09:04] (current) – external edit 127.0.0.1 | ||
|---|---|---|---|
| Line 1: | Line 1: | ||
| + | ====== Photolithography ====== | ||
| + | |||
| + | The ECE Cleanroom in Owen has a mask aligner and photolithography processing stations available for use. Proper training must be received prior to using the equipment (see Chris Tasker). | ||
| + | |||
| + | Photolithography masks can be created via a laser writing tool (also in the cleanroom). Smallest feature size is approximately 500 nm. Chrome/ | ||
| + | |||
| + | [[http:// | ||
| + | |||
| ====== Shadow Masks ====== | ====== Shadow Masks ====== | ||
| - | Shadow masks for depositing films and wires have been made with the help of Jack Rundel | + | Shadow masks for depositing films and wires have been made with the help of Todd Miller |
| - | We have created masks out of 50um 304SS flat shim stock and 75um 316SS shim stock. Other materials are available for use. | + | We have created masks out of 50um 304SS flat shim stock and 75um 316SS shim stock. Other materials are available for use. Drawings should be made in a CAD program that can export to DXF (SolidWorks, |
| - | The tool used to cut the masks is the ESI5330 UV Laser Drill. The cutting path of the drill is controlled by relatively simple "G code." SolidWorks can be used to create more complex models that can be converted into G code at MBI. Guest workstations with SolidWorks and other programs are available for use. Jack has a great step by step guide on how to properly export the models and get the data to the drill. | + | The tool used to cut the masks is the ESI5330 UV Laser Drill. The cutting path of the drill is controlled by relatively simple "G code." |
| For the shim stock, the average line width is about 50um, although 20um lines have been achieved. | For the shim stock, the average line width is about 50um, although 20um lines have been achieved. | ||
| ===== G Code for the ESI5330 ===== | ===== G Code for the ESI5330 ===== | ||
| + | |||
| Example G code that describes a 10mm square within a 30mm square. All coordinates are shown in micron units. The internal features cut first. The part perimeter cuts last. | Example G code that describes a 10mm square within a 30mm square. All coordinates are shown in micron units. The internal features cut first. The part perimeter cuts last. | ||
| Line 42: | Line 51: | ||
| </ | </ | ||
| + | The following is the G code for an example of a shadow mask made for 3-omega measurements. | ||
| + | |||
| + | < | ||
| + | |||
| + | % | ||
| + | (ESI5330) | ||
| + | T1 6 | ||
| + | T0 221 | ||
| + | |||
| + | |||
| + | P0 | ||
| + | |||
| + | G0 X3000.0 Y1960.0 | ||
| + | G1 Y2000.0 | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | | ||
| + | |||
| + | |||
| + | G0 X9500.0 Y6000.0 | ||
| + | G3 I9000.0 J6000.0 | ||
| + | |||
| + | |||
| + | G0 X7500.0 | ||
| + | G3 I7000.0 J6000.0 | ||
| + | |||
| + | |||
| + | G0 X5500.0 | ||
| + | G3 I5000.0 J6000.0 | ||
| + | |||
| + | |||
| + | G0 X3500.0 | ||
| + | G3 I3000.0 J6000.0 | ||
| + | |||
| + | P1 | ||
| + | |||
| + | P0 | ||
| + | |||
| + | G0 X12000.0 Y0.0 | ||
| + | G1 X0.0 | ||
| + | |||
| + | G0 X12000.0 Y12000.0 | ||
| + | G1 Y0.0 | ||
| + | |||
| + | |||
| + | G0 X0.0 Y12000.0 | ||
| + | G1 X12000.0 | ||
| + | |||
| + | G0 X0.0 Y0.0 | ||
| + | G1 Y12000.0 | ||
| + | |||
| + | P1 | ||
| + | % | ||
| + | |||
| + | </ | ||
