http://sites.science.oregonstate.edu/~tatej/TateLabWiki/ 2026-05-14T05:09:24+00:00 http://sites.science.oregonstate.edu/~tatej/TateLabWiki/ http://sites.science.oregonstate.edu/~tatej/TateLabWiki/lib/tpl/monobook/images/favicon.ico text/html 2020-03-06T09:04:32+00:00 Anonymous (anonymous@undisclosed.example.com) http://sites.science.oregonstate.edu/~tatej/TateLabWiki/doku.php?id=sputter:start&rev=1583514272&do=diff Gilbert Hall Sputter System As of 2013, this system has been DECOMMSSIONED. The Tate Lab maintains an RF sputter system in Gilbert 130. It is a large system (> 100 liter?), currently turbo pumped. It has two 2“ guns, 1 1” gun, 2 rf power supplies. Base pressure is about 10^-6 torr. 2011 - Chris Reidy knows most about this system. (Formerly: 2009 Annette Richard & Joe Magner; 2005 Jack Rundel; 2004 Dave Mack; 2003 James Osborne; 2002 Matt Price)