http://sites.science.oregonstate.edu/~tatej/TateLabWiki/ 2026-07-01T01:06:11+00:00 http://sites.science.oregonstate.edu/~tatej/TateLabWiki/ http://sites.science.oregonstate.edu/~tatej/TateLabWiki/lib/tpl/monobook/images/favicon.ico text/html 2020-11-24T23:44:27+00:00 Anonymous (anonymous@undisclosed.example.com) http://sites.science.oregonstate.edu/~tatej/TateLabWiki/doku.php?id=gashandling:start&rev=1606290267&do=diff Gas Handling Updated by Janet 9/17/2014 Summary We use many compressed gas cylinders in our labs: KrF/Ne premix for the excimer laser, high purity He to purge the excimer laser and to refill the CCR compressor, regular grade He for leak detections, N2 to vent the vacuum chambers, high purity O2 as a deposition gas, Ar or Ar/O2 mix as a sputter or PLD gas, and high pressure nitrogen to run the MMR cryostat. And others! You should understand the safety issues associated with the gases themselv…