Tate Lab Wiki

You are here: start » vacuum_maintenance

This is an old revision of the document!

Mechanical pumps get oil changes every six months.

Varian Pumping Station
Date Name
06/2011 JF Changed oil, cleaned glass, flushed with new oil
Edwards Rough Pump - Thermionics Main Chamber

Fill with PFPE oil only.

Date Name
06/2011 JF/CR Changed oil
Alcatel Rough Pump - Thermionics Load Lock
Date Name
06/2011 JF/CR Changed oil, cleaned inlet filter
Thermal Evaporator
Date Name
Seebeck Pumping Station
Date Name
06/2011 JF Changed oil
Optical Cryostat
Date Name

Trace: • jobs • ellipsometry • opticalspectrometers • xrd • manuals • labview • computers • thermalcond • substrate • vacuum_maintenance

QR Code
QR Code vacuum_maintenance (generated for current page)