This is an old revision of the document!
Gilbert Hall Sputter System
As of 2013, this system has been DECOMMSSIONED.
The Tate Lab maintains an RF sputter system in Gilbert 130. It is a large system (> 100 liter?), currently turbo pumped. It has two 2“ guns, 1 1” gun, 2 rf power supplies. Base pressure is about 10^-6 torr. 2011 - Chris Reidy knows most about this system. (Formerly: 2009 Annette Richard & Joe Magner; 2005 Jack Rundel; 2004 Dave Mack; 2003 James Osborne; 2002 Matt Price)
9/2011: Robert Kykyneshi reminded me that Chris Tasker (ECE) had borrowed one of the RF powers supplies and corresponding matching network. There is currently only one set in Gilbert 130.
Documentation
A linked Word document updated 2005 is here:Gilbert 130 Sputter System. Some of this is outdated (2011) because the system has been moved to Gil 130 from Gil 212 since then.
