The Tate Lab maintains an RF sputter system in Gilbert 130. It is a large system (> 100 liter?), currently turbo pumped. It has two 2“ guns, 1 1” gun, 2 rf power supplies. Base pressure is about 10^-6 torr. 2011 - Chris Reidy knows most about this system. (Formerly: 2009 Annette Richard & Joe Magner; 2005 Jack Rundel; 2004 Dave Mack; 2003 James Osborne; 2002 Matt Price)

9/2011: Robert Kykyneshi reminded me that Chris Tasker (ECE) had borrowed one of the RF powers supplies and corresponding matching network. There is currently only one set in Gilbert 130.

A linked Word document updated 2005 is here:Gilbert 130 Sputter System. Some of this is outdated (2011) because the system has been moved since then.