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Maintenance Schedule

Object Location Action Period/Condition Notes
Alcatel mechanical pump Thermionics Load Lock Change oil, clean filter, replace sorbent as needed 6 month Hydrocarbon oil
BOC Edwards Mechanical Pump Thermionics Main Chamber Change oil, clean filter, replace sorbent as needed 6 months Krytox only. No Hydrocarbons
Alcatel Turbo Pump Thermionics Load Lock Lubricate bearings 5000 hours Syringes are cheapest from Ideal Vacuum
BOC Edwards Turbo Pump Thermionics Main Chamber Check temperature Weekly
Chiller Thermionics Main Chamber Check water level 6 month
Beam Entrance Port Thermionics Main Chamber Clean with Vienna chalk, record transmission when coated, or when chamber is vented
KrF gas Excimer Laser Follow instructions Low beam energy, missing pulses
Halogen Filter Excimer Laser Mechanical Pump Replace filter Filling >90%
Clean laser optics Excimer laser See manual Output energy < 250mJ @ 7Hz, after fresh gas change

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