| Object | Location | Action | Period/Condition | Notes |
| Alcatel mechanical pump | Thermionics Load Lock | Change oil, clean filter, replace sorbent as needed | 6 month | Hydrocarbon oil |
| BOC Edwards Mechanical Pump | Thermionics Main Chamber | Change oil, clean filter, replace sorbent as needed | 6 months | Krytox only. No Hydrocarbons |
| Alcatel Turbo Pump | Thermionics Load Lock | Lubricate bearings | 5000 hours | Syringes are cheapest from Ideal Vacuum |
| BOC Edwards Turbo Pump | Thermionics Main Chamber | Check temperature | Weekly | |
| Chiller | Thermionics Main Chamber | Check water level | 6 month | |
| Beam Entrance Port | Thermionics Main Chamber | Clean with Vienna chalk, record transmission | when coated, or when chamber is vented | |
| KrF gas | Excimer Laser | Follow instructions | Low beam energy, missing pulses | |
| Halogen Filter | Excimer Laser Mechanical Pump | Replace filter | Filling >90% | |
| Clean laser optics | Excimer laser | See manual | Output energy < 250mJ @ 7Hz, after fresh gas change | |
