Shadow Masks

Shadow masks for depositing films and wires have been made with the help of Jack Rundel (rundelj@engr.orst.edu) at the MBI (Microproducts Breakthrough Institute on HP campus).

We have created masks out of 50um 304SS flat shim stock and 75um 316SS shim stock. Other materials are available for use.

The tool used to cut the masks is the ESI5330 UV Laser Drill. The cutting path of the drill is controlled by relatively simple “G code.” SolidWorks can be used to create more complex models that can be converted into G code at MBI. Guest workstations with SolidWorks and other programs are available for use. Jack has a great step by step guide on how to properly export the models and get the data to the drill.

For the shim stock, the average line width is about 50um, although 20um lines have been achieved.

Example G code that describes a 10mm square within a 30mm square. All coordinates are shown in micron units. The internal features cut first. The part perimeter cuts last. “G0” = move to this point without cutting “G1” = move to this point while cutting

%
(ESI5330)
T1 6
T0 221

*** internal features ***
P0
G0 X10000.0 Y10000.0
G1 X20000.0
   Y20000.0
   X10000.0
   Y10000.0
P1


*** part perimeter ***
P0
G0 X0.0 Y0.0
G1 X30000.0
   Y30000.0
   X0.0
   Y0.0
P1
%

The following is the G code for an example of a shadow mask made for 3-omega measurements.

%
(ESI5330)
T1 6
T0 221


P0

G0 X3000.0 Y1960.0
G1 Y2000.0
 Y4000.0
 X5000.0
 Y2000.0
 X5980.0
 Y10000.0
 X5000.0
 Y8000.0
 X3000.0
 Y10000.0
 Y10040.0
 X9000.0
 Y10000.0
 Y8000.0
 X7000.0
 Y10000.0
 X6000.0
 Y2000.0
 X7000.0
 Y4000.0
 X9000.0
 Y2000.0
 Y1960.0
 X3000.0


G0 X9500.0 Y6000.0
G3 I9000.0 J6000.0


G0 X7500.0
G3 I7000.0 J6000.0


G0 X5500.0
G3 I5000.0 J6000.0


G0 X3500.0
G3 I3000.0 J6000.0

P1

P0

G0 X12000.0 Y0.0
G1 X0.0

G0 X12000.0 Y12000.0
G1 Y0.0
	

G0 X0.0 Y12000.0
G1 X12000.0

G0 X0.0 Y0.0
G1 Y12000.0

P1
%