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pld:start [2016/04/14 10:42] – james | pld:start [2016/04/21 12:11] – james |
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There are many windows on the thermionics chamber. However, there are two UV grade laser windows. Each of these is mounted in a ConFlat flange. Each of the laser windows is made of [[http://marketplace.idexop.com/store/SupportDocuments/MaterialProperties.pdf|fused silica]], and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm. | There are many windows on the thermionics chamber. However, there are two UV grade laser windows. Each of these is mounted in a ConFlat flange. Each of the laser windows is made of [[http://marketplace.idexop.com/store/SupportDocuments/MaterialProperties.pdf|fused silica]], and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm. |
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===== Procedure ===== | ===== Standard Operating Procedure ===== |
{{:pld:pld_procedure.tex.pdf|Thermionics Chamber}} - Josh Russell | {{:pld:pld_procedure.tex.pdf|Thermionics Chamber}} |
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{{:pld:neocera.pld.instructions.pdf|Neocera Chamber}} | {{:pld:neocera_chamber_sop.pdf|Neocera Chamber}} |
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| {{:pld:laser_sop-tate_lab.doc|Laser Operation}} |
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{{:pld:gas_change_20150416.pdf|Laser Gas Change}} | {{:pld:gas_change_20150416.pdf|Laser Gas Change}} |
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{{:pld:PLD_viewing_window_cleaning_20150422.pdf|Chamber Window Cleaning}} | {{:pld:PLD_viewing_window_cleaning_20150422.pdf|Chamber Window Cleaning}} |
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FIXME | |
Chamber cleaning procedures | |
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===== Routine Maintenance ===== | ===== Routine Maintenance ===== |
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Usually purchased from Airgas, contact can be found by following the [[:Purchasing|Purchasing]] link | Usually purchased from Airgas, contact can be found by following the [[:Purchasing|Purchasing]] link |
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| ==Cleaning/polishing Targets and Substrate Holders== |
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| The process we use for cleaning targets/substrate holders includes a series of increasing grit sand paper. The grit sizes range from 200 to 2000 and depending on the density of the material we may start at a smaller or larger grit. For example a soft ceramic target will most likely require you to start with a higher grit (say 800 or 1000) while polishing the substrate holders may require a much lower grit (say 200 or 400) to remove as much of the deposited material as possible. One thing to keep in mind when polishing targets/substrate holders is that the type of material you are polishing may be toxic. A list of toxic metals which need to be disposed of through EH&S is posted on the fume hood and can also be found {{:pld:hazardous_heavy_metals.docx|here}}. |
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