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pld:start [2016/04/14 10:41] – james | pld:start [2016/04/14 10:42] – james | ||
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==Changing Gas== | ==Changing Gas== | ||
Process Tube {{: | Process Tube {{: | ||
- | The premixed gas we use is: 0.1% F2, 1.7% He, 3.93% Kr, balance Ne (i.e. rest is Neon), and the SDS is {{:pld:gas_change_20150416.pdf|KrF premix SDS}} | + | The premixed gas we use is: 0.1% F2, 1.7% He, 3.93% Kr, balance Ne (i.e. rest is Neon), and the SDS is {{:pld:krf_premix_spectra.pdf|KrF premix SDS}} |
Usually purchased from Airgas, contact can be found by following the [[: | Usually purchased from Airgas, contact can be found by following the [[: |