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pld:start [2016/04/14 10:14] – jamespld:start [2016/04/14 10:40] – james
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 {{:pld:compex_0300_user_manual_.pdf|ComPex 201 excimer laser manual}} {{:pld:compex_0300_user_manual_.pdf|ComPex 201 excimer laser manual}}
  
-{{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205+{{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 201
  
  
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 ==Changing Gas== ==Changing Gas==
 Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}} Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}}
-The premixed gas we use is: 0.1% F2, 1.7% He, 3.93% Kr, balance Ne (i.e. rest is Neon).+The premixed gas we use is: 0.1% F2, 1.7% He, 3.93% Kr, balance Ne (i.e. rest is Neon), and the SDS is {{:pld:dbc2-12_chamber_darwing.pdf|KrF premix SDS}}
  
 Usually purchased from Airgas, contact can be found here [[:Purchasing|Purchasing]] Usually purchased from Airgas, contact can be found here [[:Purchasing|Purchasing]]

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