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pld:start [2015/10/01 11:22] – janet | pld:start [2016/04/14 11:21] – james |
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====== Pulsed Laser Deposition ====== | ====== Pulsed Laser Deposition ====== |
The PLD system comprises a ComPex 205 248-nm excimer laser plus optical elements and two vacuum chambers. It is located in Weniger 475. [[safety:start|Safety]] procedures must be observed at all times. | The PLD system comprises a ComPex 201 248-nm excimer laser plus optical elements and two vacuum chambers. It is located in Weniger 475. [[safety:start|Safety]] procedures must be observed at all times. |
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A log of important modifications to the system can be found [[pld:changelog|here]]. If you want to know why something is the way it is, start here. | A log of important modifications to the system can be found [[pld:changelog|here]]. If you want to know why something is the way it is, start here. |
There are many windows on the thermionics chamber. However, there are two UV grade laser windows. Each of these is mounted in a ConFlat flange. Each of the laser windows is made of [[http://marketplace.idexop.com/store/SupportDocuments/MaterialProperties.pdf|fused silica]], and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm. | There are many windows on the thermionics chamber. However, there are two UV grade laser windows. Each of these is mounted in a ConFlat flange. Each of the laser windows is made of [[http://marketplace.idexop.com/store/SupportDocuments/MaterialProperties.pdf|fused silica]], and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm. |
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===== Procedure ===== | ===== Standard Operating Procedure ===== |
{{:pld:pld_procedure.tex.pdf|Thermionics Chamber}} - Josh Russell | {{:pld:pld_procedure.tex.pdf|Thermionics Chamber}} |
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{{:pld:neocera.pld.instructions.pdf|Neocera Chamber}} | {{:pld:neocera_chamber_sop.pdf|Neocera Chamber}} |
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| {{:pld:laser_sop-tate_lab.doc|Laser Operation}} |
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{{:pld:gas_change_20150416.pdf|Laser Gas Change}} | {{:pld:gas_change_20150416.pdf|Laser Gas Change}} |
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{{:pld:PLD_viewing_window_cleaning_20150422.pdf|Chamber Window Cleaning}} | {{:pld:PLD_viewing_window_cleaning_20150422.pdf|Chamber Window Cleaning}} |
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FIXME | |
Chamber cleaning procedures | |
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===== Routine Maintenance ===== | ===== Routine Maintenance ===== |
heating | heating |
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{{:pld:compex_0300_user_manual_.pdf|ComPex 205 excimer laser manual}} | {{:pld:compex_0300_user_manual_.pdf|ComPex 201 excimer laser manual}} |
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{{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205 | {{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 201 |
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==Changing Gas== | ==Changing Gas== |
Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}} | Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}} |
The premixed gas we use is: 0.1% F2, 1.7% He, 3.93% Kr, balance Ne (i.e. rest is Neon). | The premixed gas we use is: 0.1% F2, 1.7% He, 3.93% Kr, balance Ne (i.e. rest is Neon), and the SDS is {{:pld:krf_premix_spectra.pdf|KrF premix SDS}} |
When to change? | |
Who do we get it from? Price? | Usually purchased from Airgas, contact can be found by following the [[:Purchasing|Purchasing]] link |
Procedure? | |
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===== Service ===== | ===== Service ===== |