Tate Lab Wiki

You are here: start » pld

Differences

This shows you the differences between two versions of the page.

Link to this comparison view

Both sides previous revisionPrevious revision
Next revisionBoth sides next revision
pld:start [2015/10/01 11:22] – janetpld:start [2016/04/14 10:13] – james
Line 94: Line 94:
 heating heating
  
-{{:pld:compex_0300_user_manual_.pdf|ComPex 205 excimer laser manual}}+{{:pld:compex_0300_user_manual_.pdf|ComPex 201 excimer laser manual}}
  
 {{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205 {{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205
Line 105: Line 105:
 Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}} Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}}
 The premixed gas we use is: 0.1% F2, 1.7% He, 3.93% Kr, balance Ne (i.e. rest is Neon). The premixed gas we use is: 0.1% F2, 1.7% He, 3.93% Kr, balance Ne (i.e. rest is Neon).
-When to change? + 
-Who do we get it from? Price? +Usually purchased from Airgas, contact can be found here [[:Purchasing|Purchasing]] 
-Procedure?+
  
 ===== Service ===== ===== Service =====

Trace:

QR Code
QR Code pld:start (generated for current page)