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pld:start [2015/09/29 13:55] – bethanypld:start [2016/04/14 10:46] – james
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 ====== Pulsed Laser Deposition ====== ====== Pulsed Laser Deposition ======
-The PLD system comprises a ComPex 205 248-nm excimer laser plus optical elements and two vacuum chambers.  It is located in Weniger 475.  [[safety:start|Safety]] procedures must be observed at all times.+The PLD system comprises a ComPex 201 248-nm excimer laser plus optical elements and two vacuum chambers.  It is located in Weniger 475.  [[safety:start|Safety]] procedures must be observed at all times.
  
 A log of important modifications to the system can be found [[pld:changelog|here]].  If you want to know why something is the way it is, start here. A log of important modifications to the system can be found [[pld:changelog|here]].  If you want to know why something is the way it is, start here.
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 There are many windows on the thermionics chamber.  However, there are two UV grade laser windows.  Each of these is mounted in a ConFlat flange.  Each of the laser windows is made of [[http://marketplace.idexop.com/store/SupportDocuments/MaterialProperties.pdf|fused silica]], and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm. There are many windows on the thermionics chamber.  However, there are two UV grade laser windows.  Each of these is mounted in a ConFlat flange.  Each of the laser windows is made of [[http://marketplace.idexop.com/store/SupportDocuments/MaterialProperties.pdf|fused silica]], and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm.
  
-===== Procedure ===== +===== Standard Operating Procedure ===== 
-{{:pld:pld_procedure.tex.pdf|Thermionics Chamber}} - Josh Russell+{{:pld:pld_procedure.tex.pdf|Thermionics Chamber}}
  
 {{:pld:neocera.pld.instructions.pdf|Neocera Chamber}} {{:pld:neocera.pld.instructions.pdf|Neocera Chamber}}
 +
 +{{:pld:gas_change_20150416.pdf|Laser Operation}}
  
 {{:pld:gas_change_20150416.pdf|Laser Gas Change}} {{:pld:gas_change_20150416.pdf|Laser Gas Change}}
  
 {{:pld:PLD_viewing_window_cleaning_20150422.pdf|Chamber Window Cleaning}} {{:pld:PLD_viewing_window_cleaning_20150422.pdf|Chamber Window Cleaning}}
- 
- 
-FIXME 
-Chamber cleaning procedures 
  
 ===== Routine Maintenance ===== ===== Routine Maintenance =====
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 heating heating
  
-{{:pld:compex_0300_user_manual_.pdf|ComPex 205 excimer laser manual}}+{{:pld:compex_0300_user_manual_.pdf|ComPex 201 excimer laser manual}} 
 + 
 +{{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 201
  
-{{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205 
  
-Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}} 
  
 {{:pld:dbc2-12_chamber_darwing.pdf|Neocera 12" chamber drawing}} {{:pld:dbc2-12_chamber_darwing.pdf|Neocera 12" chamber drawing}}
 +
 +==Changing Gas==
 +Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}}
 +The premixed gas we use is: 0.1% F2, 1.7% He, 3.93% Kr, balance Ne (i.e. rest is Neon), and the SDS is {{:pld:krf_premix_spectra.pdf|KrF premix SDS}}
 +
 +Usually purchased from Airgas, contact can be found by following the [[:Purchasing|Purchasing]] link
 +
  
 ===== Service ===== ===== Service =====

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