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pld:start [2015/09/29 13:55] – bethanypld:start [2016/04/14 10:13] – james
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 heating heating
  
-{{:pld:compex_0300_user_manual_.pdf|ComPex 205 excimer laser manual}}+{{:pld:compex_0300_user_manual_.pdf|ComPex 201 excimer laser manual}}
  
 {{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205 {{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205
  
-Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}}+
  
 {{:pld:dbc2-12_chamber_darwing.pdf|Neocera 12" chamber drawing}} {{:pld:dbc2-12_chamber_darwing.pdf|Neocera 12" chamber drawing}}
 +
 +==Changing Gas==
 +Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}}
 +The premixed gas we use is: 0.1% F2, 1.7% He, 3.93% Kr, balance Ne (i.e. rest is Neon).
 +
 +Usually purchased from Airgas, contact can be found here [[:Purchasing|Purchasing]]
 +
  
 ===== Service ===== ===== Service =====

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