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pld:start [2015/02/10 22:42] – james | pld:start [2015/08/18 11:09] – janet | ||
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The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock. The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections. | The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock. The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections. | ||
- | {{:pld:pld_thermionics_system.gif|}} FIXME - make this smaller | + | {{:pld:thermionics_chamber_20150422.png|}} |
==== Load Lock ==== | ==== Load Lock ==== | ||
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{{: | {{: | ||
- | {{:pld:gas_change_20120606.pdf|Laser Gas Change}} | + | {{:pld:gas_change_20150416.pdf|Laser Gas Change}} |
+ | |||
+ | {{: | ||
FIXME | FIXME | ||
- | Chamber | + | Chamber cleaning procedures |
===== Routine Maintenance ===== | ===== Routine Maintenance ===== | ||
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{{: | {{: | ||
+ | ===== Service ===== | ||
+ | [[https:// |