Differences

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--- pld:start [2015/02/10 22:31] – james
+++ pld:start [2016/12/08 14:23] – bethany
@@ Line 1: / Line 1: @@
 ====== Pulsed Laser Deposition ======
-The PLD system comprises a ComPex 205 248-nm excimer laser plus optical elements and two vacuum chambers.  It is located in Weniger 475.  [[safety:start|Safety]] procedures must be observed at all times.
+The PLD system comprises a ComPex 201 248-nm excimer laser plus optical elements and two vacuum chambers.  It is located in Weniger 475.  [[safety:start|Safety]] procedures must be observed at all times.
 A log of important modifications to the system can be found [[pld:changelog|here]].  If you want to know why something is the way it is, start here.
@@ Line 8: / Line 8: @@
 The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock.  The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections.  The load lock and the main chamber are each served by two vacuum pumps, a turbo-molecular pump and a roughing pump working in series.
-{{:pld:pld_thermionics_system.gif|}}  FIXME - make this smaller
+{{:pld:thermionics_chamber_20150422.png|}}
+{{PLD_process_schematic-ours.png|}}
 ==== Load Lock ====
@@ Line 46: / Line 48: @@
 //Thermionics chamber//: The Thermionics chamber is set up so that in event of a power failure, the valves between the roughing and turbo pumps will remain closed and the pumps will not turn back on when power is restored. However, the gate valve to the main chamber will be automatically closed, which will prevent the chamber from venting to atmospheric pressure immediately. With the gate valve closed, the pressure should stay in the 10<sup>-7</sup> Torr range and very slowly increase until the system is reset.
-If you discover that the power has gone out, make sure that the gate valve has closed (by the red indicator light if the power has been restored, or the white spot on the indicator beneath the gate valve motor is on closed). If the valve is closed, you can use {{:pld:pldthermionicsresetinstructions012915.pdf|these instructions}} to restore the system.  If the pressure is higher than 10<sup>-3</sup> or if the gate valve does not appear to have closed, then follow the Pump Down Procedures in the instructions (toggle switch up on silver panel, reset buttons on black panels, wait for the pressure to drop below 10<sup>-3</sup> Torr range, then restart Turbo Pumps). Here is a schematic for reference.{{:pld:control_tower.gif|}}
+If you discover that the power has gone out, make sure that the gate valve has closed (by the red indicator light if the power has been restored, or the white spot on the indicator beneath the gate valve motor is on closed). If the valve is closed, you can use {{:pld:reset_pld_thermionics_2016.pdf|these instructions}} to restore the system.  If the pressure is higher than 10<sup>-3</sup> or if the gate valve does not appear to have closed, then follow the Pump Down Procedures in the instructions (toggle switch up on silver panel, reset buttons on black panels, wait for the pressure to drop below 10<sup>-3</sup> Torr range, then restart Turbo Pumps). Here is a schematic for reference.{{:pld:control_tower.gif|}}
@@ Line 61: / Line 63: @@
 ==== Mirrors ====
-The 3 mirrors used in the optical tower are from OptoSigma (part no. 034-0185 and ).  These mirrors are made of a borosilicate glass (BK7) and are designed specifically for KrF laser use at 45 degrees incidence. When configured in this way, the reflectance should be > 99%. The mirrors on the lowest two tiers of the optics tower are arranged at this angle of incidence.  The mirror on the highest tier of the optics tower is setup such that the angle of incidence is 30 degrees.
+The 3 mirrors used in the optical tower are from OptoSigma (part no. [[http://www.optosigma.com/products/optical-components/mirrors/laser-line-mirrors/034-0185|034-0185]] and ).  These mirrors are made of a borosilicate glass (BK7) and are designed specifically for KrF laser use at 45 degrees incidence. When configured in this way, the reflectance should be > 99%. The mirrors on the lowest two tiers of the optics tower are arranged at this angle of incidence.  The mirror on the highest tier of the optics tower is setup such that the angle of incidence is 30 degrees.
 {{:pld:bk7.jpg|thumb}}
 \\
 ==== Lenses ====
 The two focusing lenses (one for each chamber) used are of the plano-convex type, and are made of UV grade fused silica.  The lenses used have no coatings, and have different focal lengths.  The lens used with the Thermionics chamber is OptoSigma part no. {{:pld:fused_silica_plano_convex_lenses.pdf|014-1315}}.
 ==== Windows ====
-There are many windows on the thermionics chamber.  However, there are two UV grade laser windows.  Each of these is mounted in a ConFlat flange.  Each of the laser windows is made of fused silica, and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm.
+There are many windows on the thermionics chamber.  However, there are two UV grade laser windows.  Each of these is mounted in a ConFlat flange.  Each of the laser windows is made of [[http://marketplace.idexop.com/store/SupportDocuments/MaterialProperties.pdf|fused silica]], and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm.
-===== Procedure =====
+===== Standard Operating Procedure =====
-{{:pld:pld_procedure.tex.pdf|Thermionics Chamber}} - Josh Russell
+{{:pld:pld_procedure.tex.pdf|Thermionics Chamber}}
-{{:pld:neocera.pld.instructions.pdf|Neocera Chamber}}
+{{:pld:neocera_chamber_sop.pdf|Neocera Chamber}}
-{{:pld:gas_change_20120606.pdf|Laser Gas Change}}
+{{:pld:laser_sop-tate_lab.doc|Laser Operation}}
-FIXME
+{{:pld:gas_change_20150416.pdf|Laser Gas Change}}
-Chamber cleaning procedures, viewing window cleaning procedures
+{{:pld:PLD_viewing_window_cleaning_20150422.pdf|Chamber Window Cleaning}}
 ===== Routine Maintenance =====
@@ Line 90: / Line 94: @@
 heating
-{{:pld:compex_0300_user_manual_.pdf|ComPex 205 excimer laser manual}}
+{{:pld:compex_0300_user_manual_.pdf|ComPex 201 excimer laser manual}}
+{{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 201
-{{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205
-Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}}
 {{:pld:dbc2-12_chamber_darwing.pdf|Neocera 12" chamber drawing}}
+==Changing Gas==
+Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}}
+The premixed gas we use is: 0.1% F2, 1.7% He, 3.93% Kr, balance Ne (i.e. rest is Neon), and the SDS is {{:pld:krf_premix_spectra.pdf|KrF premix SDS}}
+Usually purchased from Airgas, contact can be found by following the [[:Purchasing|Purchasing]] link
+==Cleaning/polishing Targets and Substrate Holders==
+The process we use for cleaning targets/substrate holders includes a series of increasing grit sand paper.  The grit sizes range from 200 to 2000 and depending on the density of the material we may start at a smaller or larger grit.  For example a soft ceramic target will most likely require you to start with a higher grit (say 800 or 1000) while polishing the substrate holders may require a much lower grit (say 200 or 400) to remove as much of the deposited material as possible.  One thing to keep in mind when polishing targets/substrate holders is that the type of material you are polishing may be toxic.  A list of toxic metals which need to be disposed of through EH&S is posted on the fume hood and can also be found {{:pld:hazardous_heavy_metals.docx|here}}.
+===== Service =====
+[[https://www.linkedin.com/pub/frank-cipolla/6/a2a/340|Frank Cipolla]], ONI Corp, (954) 296-0350, formerly of Lambda Physik, has worked on our laser.  Very good service.
+email is the best way to contact Frank, frank-cipolla@oni-corp.com

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