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pld:start [2015/02/10 22:31] – james | pld:start [2015/08/18 11:09] – janet | ||
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The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock. The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections. | The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock. The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections. | ||
- | {{:pld:pld_thermionics_system.gif|}} FIXME - make this smaller | + | {{:pld:thermionics_chamber_20150422.png|}} |
==== Load Lock ==== | ==== Load Lock ==== | ||
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==== Mirrors ==== | ==== Mirrors ==== | ||
- | The 3 mirrors used in the optical tower are from OptoSigma (part no. 034-0185 and ). These mirrors are made of a borosilicate glass (BK7) and are designed specifically for KrF laser use at 45 degrees incidence. When configured in this way, the reflectance should be > 99%. The mirrors on the lowest two tiers of the optics tower are arranged at this angle of incidence. | + | The 3 mirrors used in the optical tower are from OptoSigma (part no. [[http:// |
{{: | {{: | ||
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==== Lenses ==== | ==== Lenses ==== | ||
The two focusing lenses (one for each chamber) used are of the plano-convex type, and are made of UV grade fused silica. | The two focusing lenses (one for each chamber) used are of the plano-convex type, and are made of UV grade fused silica. | ||
==== Windows ==== | ==== Windows ==== | ||
- | There are many windows on the thermionics chamber. | + | There are many windows on the thermionics chamber. |
===== Procedure ===== | ===== Procedure ===== | ||
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{{: | {{: | ||
- | {{:pld:gas_change_20120606.pdf|Laser Gas Change}} | + | {{:pld:gas_change_20150416.pdf|Laser Gas Change}} |
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+ | {{: | ||
FIXME | FIXME | ||
- | Chamber | + | Chamber cleaning procedures |
===== Routine Maintenance ===== | ===== Routine Maintenance ===== | ||
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{{: | {{: | ||
+ | ===== Service ===== | ||
+ | [[https:// |