| Both sides previous revisionPrevious revisionNext revision | Previous revisionNext revisionBoth sides next revision |
| pld:start [2015/02/10 22:27] – james | pld:start [2015/04/22 14:00] – james |
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| ==== Mirrors ==== | ==== Mirrors ==== |
| The 3 mirrors used in the optical tower are from OptoSigma (part no. 034-0185 and ). These mirrors are made of a borosilicate glass (BK7) and are designed specifically for KrF laser use at 45 degrees incidence. When configured in this way, the reflectance should be > 99%. The mirrors on the lowest two tiers of the optics tower are arranged at this angle of incidence. The mirror on the highest tier of the optics tower is setup such that the angle of incidence is 30 degrees. | The 3 mirrors used in the optical tower are from OptoSigma (part no. [[http://www.optosigma.com/products/optical-components/mirrors/laser-line-mirrors/034-0185|034-0185]] and ). These mirrors are made of a borosilicate glass (BK7) and are designed specifically for KrF laser use at 45 degrees incidence. When configured in this way, the reflectance should be > 99%. The mirrors on the lowest two tiers of the optics tower are arranged at this angle of incidence. The mirror on the highest tier of the optics tower is setup such that the angle of incidence is 30 degrees. |
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| {{:pld:bk7.jpg|thumb}} | {{:pld:bk7.jpg|thumb}} |
| \\==== Lenses ==== | \\ |
| The two focusing lenses (one for each chamber) used are of the plano-convex type, and are made of UV grade fused silica. The lenses used have no coatings, and have different focal lengths. The lens used with the Thermionics chamber is OptoSigma part no. 014-1315. | |
| | ==== Lenses ==== |
| | The two focusing lenses (one for each chamber) used are of the plano-convex type, and are made of UV grade fused silica. The lenses used have no coatings, and have different focal lengths. The lens used with the Thermionics chamber is OptoSigma part no. {{:pld:fused_silica_plano_convex_lenses.pdf|014-1315}}. |
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| ==== Windows ==== | ==== Windows ==== |
| There are many windows on the thermionics chamber. However, there are two UV grade laser windows. Each of these is mounted in a ConFlat flange. Each of the laser windows is made of fused silica, and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm. | There are many windows on the thermionics chamber. However, there are two UV grade laser windows. Each of these is mounted in a ConFlat flange. Each of the laser windows is made of [[http://marketplace.idexop.com/store/SupportDocuments/MaterialProperties.pdf|fused silica]], and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm. |
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| ===== Procedure ===== | ===== Procedure ===== |
| {{:pld:neocera.pld.instructions.pdf|Neocera Chamber}} | {{:pld:neocera.pld.instructions.pdf|Neocera Chamber}} |
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| {{:pld:gas_change_20120606.pdf|Laser Gas Change}} | {{:pld:gas_change_20150416.pdf|Laser Gas Change}} |
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| | {{:pld:PLD_viewing_window_cleaning_20150422.pdf|Chamber Window Cleaning}} |
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| FIXME | FIXME |
| Chamber cleaning procedures, viewing window cleaning procedures | Chamber cleaning procedures |
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| ===== Routine Maintenance ===== | ===== Routine Maintenance ===== |
