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pld:start [2014/02/10 12:28] – janetpld:start [2014/02/10 12:29] – janet
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 === Turbo Pump === === Turbo Pump ===
 The BOC Edwards Turbo pump is an amazing, maintenance-free, wonder pump.  This pump has a low pressure limit of 10^-9 Torr, and has magnetic bearings so that there is no hydrocarbon grease vaporizing into the chamber.  If the turbine were to suffer an unbalanced build up of matter on it, changing its moment of inertia, the controller will modify the bearing properties along 5 axes (3 translational, 2 angular) such that the turbine always rotates about its center of mass in a balanced way.  When the entire system is clean, this pump easily matches it's operating pressure specs, and at times surpasses them. The BOC Edwards Turbo pump is an amazing, maintenance-free, wonder pump.  This pump has a low pressure limit of 10^-9 Torr, and has magnetic bearings so that there is no hydrocarbon grease vaporizing into the chamber.  If the turbine were to suffer an unbalanced build up of matter on it, changing its moment of inertia, the controller will modify the bearing properties along 5 axes (3 translational, 2 angular) such that the turbine always rotates about its center of mass in a balanced way.  When the entire system is clean, this pump easily matches it's operating pressure specs, and at times surpasses them.
 +
 +==== Substrate heating ====
  
 ===== Neocera Chamber ===== ===== Neocera Chamber =====
 FIXME FIXME
 +==== Substrate heating ==== 
 +FIXME
 ====Power Outages==== ====Power Outages====
 The Thermionics chamber is set up so that in event of a power failure, the valves between the roughing and turbo pumps will remain closed and the pumps will not turn back on when power is restored. The Thermionics chamber is set up so that in event of a power failure, the valves between the roughing and turbo pumps will remain closed and the pumps will not turn back on when power is restored.

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