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pld:start [2012/06/26 08:56] – jason | pld:start [2014/02/10 12:31] – janet | ||
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The PLD system comprises a ComPex 205 248-nm excimer laser plus optical elements and two vacuum chambers. | The PLD system comprises a ComPex 205 248-nm excimer laser plus optical elements and two vacuum chambers. | ||
- | A log of important modifications to the system can be found [[pld: | + | A log of important modifications to the system can be found [[pld: |
+ | |||
+ | ===== Thermionics Chamber ===== | ||
- | ===== Vacuum Systems===== | ||
- | ==== Thermionics Chamber ==== | ||
The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock. The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections. | The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock. The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections. | ||
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The BOC Edwards Turbo pump is an amazing, maintenance-free, | The BOC Edwards Turbo pump is an amazing, maintenance-free, | ||
- | ====Power Outages==== | + | ==== Substrate heating ==== |
+ | FIXME Chris | ||
+ | |||
+ | ===== Neocera Chamber ===== | ||
+ | FIXME | ||
+ | ==== Substrate heating ==== | ||
+ | FIXME | ||
+ | =====Power Outages===== | ||
The Thermionics chamber is set up so that in event of a power failure, the valves between the roughing and turbo pumps will remain closed and the pumps will not turn back on when power is restored. | The Thermionics chamber is set up so that in event of a power failure, the valves between the roughing and turbo pumps will remain closed and the pumps will not turn back on when power is restored. | ||
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===== Routine Maintenance ===== | ===== Routine Maintenance ===== | ||
+ | The maintenance schedule for the PLD lab is located [[pld: | ||
+ | |||
FIXME | FIXME | ||
Vacuum inside of laser cabinet (monthly) | Vacuum inside of laser cabinet (monthly) |