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pld:start [2011/10/15 08:40] – janet | pld:start [2012/05/09 16:49] – chris |
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==== Windows ==== | ==== Windows ==== |
There are many windows on the thermionics chamber. However, there are two UV grade laser windows. Each of these is mounted in a ConFlat flange. Each of the laser windows is made of fused silica, and measuring with the Coherent power meter, have a loss of approximately 10%. | There are many windows on the thermionics chamber. However, there are two UV grade laser windows. Each of these is mounted in a ConFlat flange. Each of the laser windows is made of fused silica, and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm. |
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===== Procedure ===== | ===== Procedure ===== |
Procedure in place in 2009: {{:pld:pld_procedure.tex.pdf|PLD procedure 2009}} Josh Russell | {{:pld:pld_procedure.tex.pdf|Thermionics Chamber}} - Josh Russell |
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| {{:pld:neocera.pld.instructions.pdf|Neocera Chamber}} |
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| {{:pld:gas_change.pdf|Laser Gas Change}} |
===== Routine Maintenance ===== | ===== Routine Maintenance ===== |
FIXME | FIXME |
| Vacuum inside of laser cabinet (monthly) |
Clean windows (how often) | Clean windows (how often) |
Check on the sample holder screw (which one?) | Check on the sample holder screw (which one?) |
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{{:pld:compex_0300_user_manual_.pdf|ComPex 205 excimer laser manual}} | {{:pld:compex_0300_user_manual_.pdf|ComPex 205 excimer laser manual}} |
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{{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205 | {{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205 |
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| Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}} |
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| {{:pld:dbc2-12_chamber_darwing.pdf|Neocera 12" chamber drawing}} |
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