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pld:start [2011/07/29 10:10] – jasonpld:start [2011/10/24 20:56] – janet
Line 58: Line 58:
 ===== Routine Maintenance ===== ===== Routine Maintenance =====
 FIXME FIXME
 +Vacuum inside of laser cabinet (monthly)
 Clean windows (how often) Clean windows (how often)
 Check on the sample holder screw (which one?) Check on the sample holder screw (which one?)
 heating heating
 +
 +{{:pld:compex_0300_user_manual_.pdf|ComPex 205 excimer laser manual}}
 +
 +{{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205
 +
 +Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}}
 +
 +{{:pld:dbc2-12_chamber_darwing.pdf|Neocera 12" chamber drawing}}
  
  

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