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| pld:start [2011/07/26 16:30] – janet | pld:start [2012/06/06 12:03] – jason |
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| The Thermionics chamber is set up so that in event of a power failure, the valves between the roughing and turbo pumps will remain closed and the pumps will not turn back on when power is restored. | The Thermionics chamber is set up so that in event of a power failure, the valves between the roughing and turbo pumps will remain closed and the pumps will not turn back on when power is restored. |
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| If you discover that the power has gone out while the pressure is still fairly low (10<sup>-3</sup> Torr), you can use these instructions to pump the system down. FIXME If the pressure is too high, then start the system up normally after restoring power to the pumps and TMP controllers (toggle switch up on silver panel, reset buttons on black panels - check fuses if nothing happens). | If you discover that the power has gone out while the pressure is still fairly low (10<sup>-3</sup> Torr), you can use {{:pld:thermionicsreset.pdf|these instructions}} to pump the system down. If the pressure is too high, then start the system up normally after restoring power to the pumps and TMP controllers (toggle switch up on silver panel, reset buttons on black panels - check fuses if nothing happens). |
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| The Edwards roughing pump on the main chamber frequently fails to start. If this happens, unplug it from the gray power strip and plug it directly into the wall. Let it run for a few minutes and then plug it back into the power strip and try to turn it on again. | The Edwards roughing pump on the main chamber frequently fails to start. If this happens, unplug it from the gray power strip and plug it directly into the wall. Let it run for a few minutes and then plug it back into the power strip and try to turn it on again. |
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| ==== Windows ==== | ==== Windows ==== |
| There are many windows on the thermionics chamber. However, there are two UV grade laser windows. Each of these is mounted in a ConFlat flange. Each of the laser windows are made of fused silica, and measuring with the Coherent power meter, have a loss of approximately 10%. | There are many windows on the thermionics chamber. However, there are two UV grade laser windows. Each of these is mounted in a ConFlat flange. Each of the laser windows is made of fused silica, and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm. |
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| | ===== Procedure ===== |
| | {{:pld:pld_procedure.tex.pdf|Thermionics Chamber}} - Josh Russell |
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| | {{:pld:neocera.pld.instructions.pdf|Neocera Chamber}} |
| | {{:pld:gas_change_20120606.pdf|Laser Gas Change}} |
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| ===== Routine Maintenance ===== | ===== Routine Maintenance ===== |
| FIXME | FIXME |
| | Vacuum inside of laser cabinet (monthly) |
| Clean windows (how often) | Clean windows (how often) |
| Check on the sample holder screw (which one?) | Check on the sample holder screw (which one?) |
| heating | heating |
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| | {{:pld:compex_0300_user_manual_.pdf|ComPex 205 excimer laser manual}} |
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| | {{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205 |
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| | Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}} |
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| | {{:pld:dbc2-12_chamber_darwing.pdf|Neocera 12" chamber drawing}} |
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