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pld:start [2011/07/26 16:29] – janet | pld:start [2012/06/27 13:54] – jason | ||
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====== Pulsed Laser Deposition ====== | ====== Pulsed Laser Deposition ====== | ||
The PLD system comprises a ComPex 205 248-nm excimer laser plus optical elements and two vacuum chambers. | The PLD system comprises a ComPex 205 248-nm excimer laser plus optical elements and two vacuum chambers. | ||
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+ | A log of important modifications to the system can be found [[pld: | ||
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===== Vacuum Systems===== | ===== Vacuum Systems===== | ||
==== Thermionics Chamber ==== | ==== Thermionics Chamber ==== | ||
The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock. The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections. | The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock. The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections. | ||
- | {{: | + | {{: |
==== Load Lock ==== | ==== Load Lock ==== | ||
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The Thermionics chamber is set up so that in event of a power failure, the valves between the roughing and turbo pumps will remain closed and the pumps will not turn back on when power is restored. | The Thermionics chamber is set up so that in event of a power failure, the valves between the roughing and turbo pumps will remain closed and the pumps will not turn back on when power is restored. | ||
- | If you discover that the power has gone out while the pressure is still fairly low (10< | + | If you discover that the power has gone out while the pressure is still fairly low (10< |
The Edwards roughing pump on the main chamber frequently fails to start. | The Edwards roughing pump on the main chamber frequently fails to start. | ||
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==== Windows ==== | ==== Windows ==== | ||
- | There are many windows on the thermionics chamber. | + | There are many windows on the thermionics chamber. |
+ | ===== Procedure ===== | ||
+ | {{: | ||
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+ | {{: | ||
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+ | {{: | ||
===== Routine Maintenance ===== | ===== Routine Maintenance ===== | ||
+ | The maintenance schedule for the PLD lab is located {{: | ||
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FIXME | FIXME | ||
+ | Vacuum inside of laser cabinet (monthly) | ||
Clean windows (how often) | Clean windows (how often) | ||
Check on the sample holder screw (which one?) | Check on the sample holder screw (which one?) | ||
heating | heating | ||
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+ | {{: | ||
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+ | {{: | ||
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+ | Process Tube {{: | ||
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+ | {{: | ||