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pld:start [2011/07/26 16:29] – janet | pld:start [2011/07/26 16:30] – janet | ||
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The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock. The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections. | The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock. The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections. | ||
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==== Load Lock ==== | ==== Load Lock ==== |