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pld:start [2011/05/31 13:41] – chrispld:start [2014/02/10 12:32] – janet
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 ====== Pulsed Laser Deposition ====== ====== Pulsed Laser Deposition ======
 The PLD system comprises a ComPex 205 248-nm excimer laser plus optical elements and two vacuum chambers.  It is located in Weniger 475.  [[safety:start|Safety]] procedures must be observed at all times. The PLD system comprises a ComPex 205 248-nm excimer laser plus optical elements and two vacuum chambers.  It is located in Weniger 475.  [[safety:start|Safety]] procedures must be observed at all times.
-===== Vacuum Systems===== + 
-==== Thermionics Chamber ====+A log of important modifications to the system can be found [[pld:changelog|here]].  If you want to know why something is the way it is, start here. 
 + 
 +===== Thermionics Chamber ===== 
 The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock.  The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections.  The load lock and the main chamber are each served by two vacuum pumps, a turbo-molecular pump and a roughing pump working in series. The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock.  The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections.  The load lock and the main chamber are each served by two vacuum pumps, a turbo-molecular pump and a roughing pump working in series.
 +
 +{{:pld:pld_thermionics_system.gif|}}  FIXME - make this smaller
 +
 ==== Load Lock ==== ==== Load Lock ====
 === Roughing Pump=== === Roughing Pump===
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 The BOC Edwards Turbo pump is an amazing, maintenance-free, wonder pump.  This pump has a low pressure limit of 10^-9 Torr, and has magnetic bearings so that there is no hydrocarbon grease vaporizing into the chamber.  If the turbine were to suffer an unbalanced build up of matter on it, changing its moment of inertia, the controller will modify the bearing properties along 5 axes (3 translational, 2 angular) such that the turbine always rotates about its center of mass in a balanced way.  When the entire system is clean, this pump easily matches it's operating pressure specs, and at times surpasses them. The BOC Edwards Turbo pump is an amazing, maintenance-free, wonder pump.  This pump has a low pressure limit of 10^-9 Torr, and has magnetic bearings so that there is no hydrocarbon grease vaporizing into the chamber.  If the turbine were to suffer an unbalanced build up of matter on it, changing its moment of inertia, the controller will modify the bearing properties along 5 axes (3 translational, 2 angular) such that the turbine always rotates about its center of mass in a balanced way.  When the entire system is clean, this pump easily matches it's operating pressure specs, and at times surpasses them.
  
-====Power Outages==== +==== Substrate heating ==== 
-The Thermionics chamber is set up so that in event of a power failure, the valves between the roughing and turbo pumps will remain closed and the pumps will not turn back on when power is restored.+FIXME Chris
  
-If you discover that the power has gone out while the pressure is still fairly low (10<sup>-3</sup> Torr), you can use these instructions to pump the system down. FIXME  If the pressure is too high, then start the system up normally after restoring power to the pumps and TMP controllers (toggle switch up on silver panel, reset buttons on black panels - check fuses if nothing happens).+===== Neocera Chamber ===== 
 +FIXME 
 +==== Substrate heating ==== 
 +FIXME 
 +=====Power Outages===== 
 +//Thermionics chamber//: The Thermionics chamber is set up so that in event of a power failure, the valves between the roughing and turbo pumps will remain closed and the pumps will not turn back on when power is restored. 
 + 
 +If you discover that the power has gone out while the pressure is still fairly low (10<sup>-3</sup> Torr), you can use {{:pld:thermionicsreset.pdf|these instructions}} to pump the system down.  If the pressure is too high, then start the system up normally after restoring power to the pumps and TMP controllers (toggle switch up on silver panel, reset buttons on black panels - check fuses if nothing happens).
  
 The Edwards roughing pump on the main chamber frequently fails to start.  If this happens, unplug it from the gray power strip and plug it directly into the wall.  Let it run for a few minutes and then plug it back into the power strip and try to turn it on again.  The Edwards roughing pump on the main chamber frequently fails to start.  If this happens, unplug it from the gray power strip and plug it directly into the wall.  Let it run for a few minutes and then plug it back into the power strip and try to turn it on again. 
  
- +//Neocera chamber//: 
 +FIXME
  
  
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 ==== Windows ==== ==== Windows ====
-There are many windows on the thermionics chamber.  However, there are two UV grade laser windows.  Each of these is mounted in a ConFlat flange.  Each of the laser windows are made of fused silica, and measuring with the Coherent power meter, have a loss of approximately 10%.+There are many windows on the thermionics chamber.  However, there are two UV grade laser windows.  Each of these is mounted in a ConFlat flange.  Each of the laser windows is made of fused silica, and measuring with the Coherent power meter, have a loss of approximately 10% at 248nm.
  
 +===== Procedure =====
 +{{:pld:pld_procedure.tex.pdf|Thermionics Chamber}} - Josh Russell
 +
 +{{:pld:neocera.pld.instructions.pdf|Neocera Chamber}}
 +
 +{{:pld:gas_change_20120606.pdf|Laser Gas Change}}
  
 ===== Routine Maintenance ===== ===== Routine Maintenance =====
 +The maintenance schedule for the PLD lab is located [[pld:maint_sched|here]].
 +
 FIXME FIXME
 +Vacuum inside of laser cabinet (monthly)
 Clean windows (how often) Clean windows (how often)
 Check on the sample holder screw (which one?) Check on the sample holder screw (which one?)
 heating heating
 +
 +{{:pld:compex_0300_user_manual_.pdf|ComPex 205 excimer laser manual}}
 +
 +{{:pld:siteprepcomp_1299.pdf|Site Prep documentaion}} for ComPex 205
 +
 +Process Tube {{:pld:os01000-001s_layout1_1_.pdf|gas cabinet layout}}
 +
 +{{:pld:dbc2-12_chamber_darwing.pdf|Neocera 12" chamber drawing}}
  
  

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