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pld:start [2011/05/31 13:41] – chrispld:start [2011/07/26 16:29] – janet
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 ==== Thermionics Chamber ==== ==== Thermionics Chamber ====
 The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock.  The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections.  The load lock and the main chamber are each served by two vacuum pumps, a turbo-molecular pump and a roughing pump working in series. The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock.  The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections.  The load lock and the main chamber are each served by two vacuum pumps, a turbo-molecular pump and a roughing pump working in series.
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 +{{:pld:pld_thermionics_system.gif|}}
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 ==== Load Lock ==== ==== Load Lock ====
 === Roughing Pump=== === Roughing Pump===

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