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pld:start [2011/04/19 12:03] – created chris | pld:start [2011/05/25 14:20] – chris | ||
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+ | The PLD system comprises a ComPex 205 248-nm excimer laser plus optical elements and two vacuum chambers. | ||
+ | ===== Vacuum Systems===== | ||
+ | ==== Thermionics Chamber ==== | ||
+ | The Thermionics chamber consists of two joined vacuum chambers, the main chamber and the load lock. The main chamber and the load lock are separated by a large gate valve which serves to isolate the two sections. | ||
+ | ==== Load Lock ==== | ||
+ | The load lock roughing and turbo pumps are manufactured by Alcatel. | ||
- | ===== Mirrors | + | The Alcatel turbo pump has a more complicated maintenance schedule. |
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+ | Bearing failure of this particular pump is known to happened at late as 20,000 hours, and as early as 6,000 hours. | ||
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+ | ===== Optical Elements | ||
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+ | ==== Mirrors | ||
The 3 mirrors used in the optical tower are from OptoSigma (part no. 034-0185 and ). These mirrors are made of a borosilicate glass (BK7) and are designed specifically for KrF laser use at 45 degrees incidence. When configured in this way, the reflectance should be > 99%. The mirrors on the lowest two tiers of the optics tower are arranged at this angle of incidence. | The 3 mirrors used in the optical tower are from OptoSigma (part no. 034-0185 and ). These mirrors are made of a borosilicate glass (BK7) and are designed specifically for KrF laser use at 45 degrees incidence. When configured in this way, the reflectance should be > 99%. The mirrors on the lowest two tiers of the optics tower are arranged at this angle of incidence. | ||
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+ | \\==== Lenses ==== | ||
+ | The two focusing lenses (one for each chamber) used are of the plano-convex type, and are made of UV grade fused silica. | ||
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+ | ==== Windows ==== | ||
+ | There are many windows on the thermionics chamber. | ||
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+ | ===== Routine Maintenance ===== | ||
+ | FIXME | ||
+ | Clean windows (how often) | ||
+ | Check on the sample holder screw (which one?) | ||
+ | heating | ||